Airgas - HE SM80 - Semiconductor Grade Helium, Size 80 High Pressure Steel Cylinder, CGA 580

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Warning

Actual volume in the cylinder may fluctuate based on numerous conditions

Semiconductor Grade Helium, Size 80 High Pressure Steel Cylinder, CGA 580

Warning

Actual volume in the cylinder may fluctuate based on numerous conditions

Airgas

SDS

Airgas Part #:HE SM80

Manufacturer Part #:SM80

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Cylinder contains approximately 75 Cubic Foot (FT3)

About this product

Helium (He) is a colorless, odorless, nonflammable, inert gas. See the Helium pages under the Pure Gases Tab on the Menu of our Specialty Gas & Equipment Catalog for detailed gas purity information.

GAS INFO

CYLINDER DETAILS

Specifications

Grade	% Purity	O₂	H₂O	THC	CO	CO₂	Ar	N2
Semiconductor	99.999	1	1	0.5	1	1	0	5

Concentrations given are ppm by volume unless otherwise specified..

Product Attributes

CGA Connection

• CGA 580

Gas Grade

• Semiconductor

Features

Airgas operates its own dedicated blending facilities as well as maintains a national network of blending technology to ensure accurate, consistent production.
Individual or Batch Certificate of Analysis available upon request.

Applications

Semiconductor grade Helium is specifically designed for semiconductor applications where purity and cleanliness is essential. Typically used in wafer fab's or other electronics manufacturing.

Safety

Always use in accordance with the Safety Data Sheet (SDS)
Cylinder must be stored and used in an upright, secured position in a well-ventilated or monitored area.
Major Hazards: Suffocation, High pressure, compressed gas

Specifications

Sizes may vary by location. Contact your local Airgas representative or local branch location for availability in your area.

DIMENSIONS

Size

80 Steel HP

DOT Specification

3AA - 2015 - Canada 3AA - M154

O.D.

7" - 178 mm

Length

31 - 787 mm

Weight

49 lbs - 22.2 kg

Water Volume

942 Cubic Inches - 15.4 ltrs

Airco/BOC

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Semiconductor Grade Helium, Size 80 High Pressure Steel Cylinder, CGA 580

DIMENSIONS